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Sample tables and axes

ST3271

Tabletop for wafers and other round samples

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We have designed the tabletop ST3271 to optimize sample preparation and surface analysis of wafers. The plate has a slot for positioning, which is compatible with the standard sizes of wafer tips. To facilitate centering the samples, the table surface can be easily adapted to the different standard sizes of wafers as well as other round samples by means of flexibly deployable pins.

 

The ST3271 wafer tabletop can be placed directly on top of a manual rotation axis PS3271, or on a software-controlled rotation axis PS3270 in order to carry out automated sample analyses.The ideal way to use the wafer table setup lies in combining it with a vacuum table ST3210. The vacuum of this accessory is effective through holes in the wafer tabletop in order to hold the samples firmly in position.

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